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Hiden PSM Probes Plasma Ions

Published: Friday, June 07, 2013
Last Updated: Thursday, June 06, 2013
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PSM systems are available with mass range options.

The Hiden differentially pumped PSM plasma probe provides measurement of the key parameters required for establishing the reaction chemistry of diverse plasma and pulsed-plasma processes.

The integrated quadrupole mass spectrometer (QMS) and Bessel-box energy analyzer generate detailed diagnostics identifying positive plasma ion species and intensities, and ion energies within a +/- 100eV energy window.

The system additionally operates as a conventional QMS for measurement of gas species and for leak detection.

The axial symmetry ensures a compact assembly requiring a minimal space envelope, with differential pumping enabling operation with process pressures from 10E-4mbar to 2mbar.

Programmable time-resolved signal gating with incremental timing delay have gate width and gate delay adjustable down to a minimum of just 100 nanoseconds.

This facility, together with the systems data accumulation mode, proves ideally suited for intimate detailing of pulsed plasma profiles and general time-variant studies.

PSM systems are available with mass range options in excess of 1000amu.

Alternative systems offer analysis of both positive and negative ions, and an ion energy range of +/-1000eV.


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