Corporate Banner
Satellite Banner
Genomics
Scientific Community
 
Become a Member | Sign in
Home>News>This Article
  News
Return

FEI Announces Release of ExSolve™

Published: Thursday, October 31, 2013
Last Updated: Thursday, October 31, 2013
Bookmark and Share
ExSolve enables semiconductor and data storage manufacturers to obtain more information faster and at lower cost for process verification.

FEI has released ExSolve™, an automated, high-throughput sample preparation workflow for transmission electron microscopy (TEM) analysis.

The ExSolve wafer TEM prep (WTP) dramatically reduces the cost and increases the speed of sample preparation, providing semiconductor and data storage manufacturers with quick and easy access to the data they need to verify and monitor process performance.

ExSolve can prepare site-specific TEM lamella, sampling many sites per wafer in a fully-automated process inside the fab, giving semiconductor manufacturers much more information than conventional approaches, while at the same time reducing the capital cost of sample preparation by up to 70 percent.

“TEM analysis is the only method that allows semiconductor manufacturers to fully characterize, understand and control their advanced manufacturing processes, such as three-dimensional and multi-gate devices, at the 20nm node and smaller. Until now, most sample preparation for TEM analysis has used slow, manual processes that break the wafer into multiple hard-to-track and hard-to-handle pieces,” states Rudy Kellner, vice president and general manager of the Industry Group at FEI.

Kellner continued, “ExSolve fully automates lamella creation from whole wafers, eliminating most of the manual sample handling and data tracking overhead. We expect ExSolve to transform the way process engineers think about process data. Instead of trying to make the most of a minimal sampling plan, they can now have fast, inexpensive access to all the data they need for thorough process verification.”

The ExSolve WTP system is an automated, high-throughput sample preparation system that can prepare site-specific, 20nm thick lamellae on whole wafers up to 300mm in diameter.

It is part of a fast, complete workflow that includes TEMLink™, and the Metrios™ TEM. The ExSolve includes FOUP handling and is designed to be located in the fab near the manufacturing line.

The ExSolve WTP workflow addresses the needs of customers that require automated, high-throughput sampling at advanced technology nodes.

It complements the capabilities of FEI’s Helios NanoLab™ DualBeam™ 1200AT, which provides more flexible, operator-directed, sample preparation methods, along with additional capabilities such as high-resolution scanning electron microscopy (SEM) imaging and analysis.


Further Information

Join For Free

Access to this exclusive content is for Technology Networks Premium members only.

Join Technology Networks Premium for free access to:

  • Exclusive articles
  • Presentations from international conferences
  • Over 3,300+ scientific posters on ePosters
  • More than 4,900+ scientific videos on LabTube
  • 35 community eNewsletters


Sign In



Forgotten your details? Click Here
If you are not a member you can join here

*Please note: By logging into TechnologyNetworks.com you agree to accept the use of cookies. To find out more about the cookies we use and how to delete them, see our privacy policy.


Scientific News
Gene Therapy for Metabolic Liver Diseases
Researchers have tested gene therapy in pigs from hereditary tyrosinemia type 1, with corrected liver cells being transplanted into the diseased liver.
Gene Terapy for Muscle Wasting Developed
New gene therapy could save millions of people suffering from muscle wasting disease.
Gene-Editing 'Toolbox' Targets Multiple Genes Simultaneously
Researchers have designed a system that modifies, or edits, multiple genes in a genome at once while minimising unintentional effects.
Discovering the First Farmers
Genetic analyses reveal a collection of highly distinct groups in the Near East and Europe at the dawn of agriculture.
Fighting Cancer Through Protein Pathways
Researchers have found a new drug target within a protein production pathway critical to regulating growth and proliferation of cells.
Mutations in DNA-Repair Genes Found in Advanced Prostate Cancers
New findings indicate that nearly 12% of male advanced prostate cancer sufferers have inherited mutation in DNA-repair genes.
Ice Bucket Challenge Instrumental in Gene Discovery
Donations from the ALS Ice Bucket Chellenge allowed for the largest-ever study of inherited ALS, which identified a new ALS gene.
Triple-Action Therapy Patch Shows Promise
Patch that delivers drug, gene, and light-based therapy to tumor sites shows promising results in mice.
Cancer Gene-Drug Combinations Ripe for Precision Medicine
The study aims to expand the number of cancer gene mutations that can be paired with a precision therapy.
Targeting BRAF Mutations in Thyroid Cancer
Treating metastatic thyroid cancer patients harboring a BRAF mutation with vemurafenib showed anti-tumor activity in a third of patients.
Skyscraper Banner

SELECTBIO Market Reports
Go to LabTube
Go to eposters
 
Access to the latest scientific news
Exclusive articles
Upload and share your posters on ePosters
Latest presentations and webinars
View a library of 1,800+ scientific and medical posters
3,300+ scientific and medical posters
A library of 2,500+ scientific videos on LabTube
4,900+ scientific videos
Close
Premium CrownJOIN TECHNOLOGY NETWORKS PREMIUM FOR FREE!