The HMT Wide-Range Vacuum Process Diagnostic
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Vacuum processing is an essential element of diverse chemical, metallurgical and electronics-related procedures including vacuum furnacing, chemical vapour deposition, surface etching and evaporative coating, with operating requirements through diverse pressure stages.
The Hiden HMT quadrupole mass spectrometer is a unique dual-mode residual gas analyzer (RGA) conceived to offer a single partial pressure gauge operating through the full vacuum spectrum from ultra-high vacuum(UHV) through to process pressures in the millitorr regime to provide process gas monitoring, vacuum background diagnostics and leak detection.
The integral dual-detector enables measurement at high pressure with the Faraday detector and at reduced pressures to UHV with the electron multiplier detector, giving a full conventional RGA specification with partial pressure detection down to 2x10E-13 torr together with a total dynamic range in excess of 10 decades.
Selection of the Process Mode instantly sets the analyzer parameters for high pressure operation with system sensitivity optimized for the specific process pressure. Selection of the RGA Mode automatically resets the system for optimum UHV sensitivity, activating the system for electron multiplier operation and enabling the overpressure protection function.
The system features template-driven quick-start operation with multiple scan mode options presenting data in terms of selected masses and time-referenced partial pressure intensities. Integration with the process control system enables remote scan control and import of external parameters such as temperature and process event stages. Multiple RGA’s are controllable by the Ethernet communication link.
