P-500 series NanoPositioners are low-profile, high-resolution, piezoelectrically driven, multi-axis flexure stages providing motion with up to 6 degrees of freedom. Linear travel ranges to 200 x 200 x 20 µm and rotation ranges to ±2 mrad are available. The 66 x 66 mm clear aperture is ideal for transmitted-light applications.
Parallel Kinematics, Versatility
The low cost and versatility of the P-500 stages are made possible by their unique single-module multi-axis design. Another advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details).
State-of-the-art trajectory control is achieved in a special 6D version of the P-500. This stage incorporates 6-axis active error compensation to force sub-nm and sub-µrad straightness and flatness (ask for separate information).
For longer travel ranges see the P-587 six-axis NanoPositioning system.
Working Principle Low-voltage PZTs (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed-loop operation (with PI electronics).
Precision Trajectory Control
Single-Module, Parallel-Kinematics Design Features Enhanced Responsiveness and Automatic Runout Compensation
1- to 6-Axis Versions
Travel Ranges to 200 µm
Clear Aperture to 66 x 66 mm
Integrated Capacitive Displacement Sensors
Optional Active Error Compensation for Enhanced Trajectory Control