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P-561, P-562, P-563 Scanning Microscopy Piezo Nanopositioning Stages

Product Description
Large Variety of Models and Options PIMars piezo stages are fast and highly accurate multi-axis scanning and nanopositioning systems that are offered in a large variety of travel ranges. Derived from the XYZ standard versions (including high-speed and vacuum versions) custom designs to 6 degrees of freedom are available on request. PIMars piezo stages are equipped with capacitive feedback sensors for highest linearity, accuracy and repeatability, in the nanometer and sub-nanometer range, and provide a positioning and scanning range of up to 300 x 300 x 250 µm.

Higher Precision through Parallel Kinematics/ Metrology
P-560 PIMars piezo scanning stages are equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details).

PIMars-Up to 6 Degrees of Freedom
The new PIMars family of nanopositioning stages offers up to 6 degrees of freedom in the footprint 150 x 150 mm² with travel ranges from 100 µm to 300 µm per axis (and rotation up to 6 mrad).

Direct Drive-Ultra-Fast Scanning and Positioning
With the same footprint as standard PIMars stages, the P-561.2DD and P-561.3DD Versions provide a resonant frequency of up to 1 kHz in X and Y. This enables millisecond scanning rates with sub-nanometer resolution over a range of 45 µm x 45 µm ( x 10 µm).

  • Single-Module, Parallel-Kinematics Design
  • Parallel Metrology/Capacitive Feedback for Nanometer Resolution
  • Low Out-of-Plane Motion
  • To 300 x 300 x 250 µm Travel Range
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DoF
  • Ultra-fast XY and XYZ Versions Available
  • Ultrahigh Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
Product P-561, P-562, P-563 Scanning Microscopy Piezo Nanopositioning Stages
Company Physik Instrumente - Products
Price Request a quote
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Physik Instrumente - Products
Auf der Römerstr. 1 D-76228 Karlsruhe Germany

Tel: +49 721 4846-0
Fax: +49 721 4846-1019

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