Large Variety of Models and Options PIMars piezo stages are fast and highly accurate multi-axis scanning and nanopositioning systems that are offered in a large variety of travel ranges. Derived from the XYZ standard versions (including high-speed and vacuum versions) custom designs to 6 degrees of freedom are available on request. PIMars piezo stages are equipped with capacitive feedback sensors for highest linearity, accuracy and repeatability, in the nanometer and sub-nanometer range, and provide a positioning and scanning range of up to 300 x 300 x 250 µm.
Higher Precision through Parallel Kinematics/ Metrology P-560 PIMars piezo scanning stages are equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details).
PIMars-Up to 6 Degrees of Freedom The new PIMars family of nanopositioning stages offers up to 6 degrees of freedom in the footprint 150 x 150 mm² with travel ranges from 100 µm to 300 µm per axis (and rotation up to 6 mrad).
Direct Drive-Ultra-Fast Scanning and Positioning With the same footprint as standard PIMars stages, the P-561.2DD and P-561.3DD Versions provide a resonant frequency of up to 1 kHz in X and Y. This enables millisecond scanning rates with sub-nanometer resolution over a range of 45 µm x 45 µm ( x 10 µm).
Single-Module, Parallel-Kinematics Design
Parallel Metrology/Capacitive Feedback for Nanometer Resolution
Low Out-of-Plane Motion
To 300 x 300 x 250 µm Travel Range
66 x 66 mm Clear Aperture
Versions to 6-DoF
Ultra-fast XY and XYZ Versions Available
Ultrahigh Vacuum Versions up to 10-9 hPa Available
Invar, Super-Invar and Titanium Versions Available