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P-620.ZCD, P-621.ZCD, P-622.ZCD PIHera® Compact Vertical Piezo Nano-Elevation Stages

Product Description
P-620.ZCD - P-622.ZCD PIHera® systems are novel piezo nano-elevation stages featuring travel ranges from 50 to 250 µm. Despite the increased travel ranges the units are extremely compact, while providing sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system which also offers excellent guiding accuracy and rapid settling.

Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors
Applications such as optical path control in interferometry, or sample positioning in microscopy require long travel ranges with nanometer positioning accuracy. PIHera® offers Z-travel ranges to 250 µm (500 µm X and XY versions are also available). The closed-loop versions are equipped with non contact, zero friction, direct-measuring two-plate capacitve position sensors. Unlike conventional indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator / guiding system.

Capacitive sensors are absolute-measuring high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01% and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability.

  • Z-Travel to 250 µm
  • Ultra-Compact Design
  • Resolution < 1 nm
  • Low Cost
  • New Longlife Piezo Drive
  • Capacitive Feedback (Closed-Loop)
  • 0.01 % Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product P-620.ZCD, P-621.ZCD, P-622.ZCD PIHera® Compact Vertical Piezo Nano-Elevation Stages
Company Physik Instrumente - Products
Price Request a quote
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Physik Instrumente - Products
Auf der Römerstr. 1 D-76228 Karlsruhe Germany

Tel: +49 721 4846-0
Fax: +49 721 4846-1019

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