P-620.ZCD - P-622.ZCD PIHera® systems are novel piezo nano-elevation stages featuring travel ranges from 50 to 250 µm. Despite the increased travel ranges the units are extremely compact, while providing sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system which also offers excellent guiding accuracy and rapid settling.
Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors Applications such as optical path control in interferometry, or sample positioning in microscopy require long travel ranges with nanometer positioning accuracy. PIHera® offers Z-travel ranges to 250 µm (500 µm X and XY versions are also available). The closed-loop versions are equipped with non contact, zero friction, direct-measuring two-plate capacitve position sensors. Unlike conventional indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator / guiding system.
Capacitive sensors are absolute-measuring high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01% and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability.