M-110, M-111 and M-112 are ultra-high resolution motorized translation stages providing linear motion of 5 to 25 mm in an extremely compact package. They feature a precision leadscrew with sub-micron resolution and precision linear ball bearings guaranteeing <0.5 µm straightness of travel.
Stepper and Servo Motors Both drive options provide a cost effective solution for industrial and OEM environments. A miniature DC or stepper motor actuates motion via a backlash-compensated leadscrew / nut system and gearhead. To meet the most critical positioning demands, the DC motor is equipped with a high resolution encoder featuring resolution of 0.007 µm per count. The combination of the extremely low stiction / friction construction and high-resolution encoder allows for minimum incremental motion of 50 nanometers at speeds up to 1.5 mm/sec.
Non-Contact Limit and Reference Switches
To protect your investment, non-contacting Hall-effect limit and reference switches are installed. Each stage includes a 0.5 m cable with 15-pin sub-D connector and a 3 m extension cable. The connector on the DC-servo versions features integrated line drivers for cable lengths up to 10 meters between actuator and controller.
M-110, M-111 and M-112 can be combined to XY and XYZ systems for multiaxis alignment applications. A variety of add-on PiezoNanoAlignment units are also available see the "Photonics" section.
0.05 µm Minimum Incremental Motion
5, 15 and 25 mm Travel Ranges
Velocity to 1.5 mm/sec.
Closed-Loop DC Motors and Stepper Motors
Integrated Hall-Effect Limit and Reference Switches