FEI Introduces new Category of Extreme High Resolution Scanning Electron Microscopy
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With its announcement of the Magellan™ Family, FEI Company has introduced a new class of instruments called extreme high-resolution scanning electron microscopes (XHR SEMs).
FEI says that the Magellan XHR SEM allows scientists and engineers to quickly see things they could not see before, such as 3D surface images at many different angles and at resolutions below one nanometer (about the size of ten hydrogen atoms, side-by-side). The Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below.
Sub-nanometer resolution has critical value in scientific research and industrial R&D. In addition, it is an absolute requirement in process development, monitoring and control applications in advanced semiconductor manufacturing.
The Magellan Family extends this capability to applications that were previously impossible or impractical with conventional SEM, transmission electron microscope (TEM) or focused ion beam (FIB) systems.
The Magellan Family’s performance derives from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage and high stability platform with fully configurable analytical chamber. The stage readily accommodates large samples or multiple smaller samples, while providing fast, accurate navigation and unequaled stability.
The Magellan Family comes in two models: The Magellan 400 is optimized for scientific research while the Magellan 400L is optimized for semiconductor labs. The semiconductor lab model comes with a load-lock feature that speeds-up sample throughput, and includes a retractable solid state backscatter electron detector (SSBSED) and S2 compliance kit.
Both models have an optional, full environmental enclosure to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs. The Magellan Family is available for purchase now, with initial shipments planned to begin in September 2008.
