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Hiden Mass Spectrometry-Based Products
The new Hiden catalogue has described the full range of Hiden mass spectrometry-based products for vacuum coating and etching processes and for surface evaluation studies. Key new products include the UHV Temperature Programmed Desorption System (TPD system) for thermal desorption studies, monitoring desorption of gaseous species through temperatures to 1000oC.
Two new Secondary Ion Mass Spectrometer Systems – the AutoSIMS and Compact SIMS – provide surface diagnostics to the atomic layer level with a choice of fully automated or manual operation.
The RGA-series products address residual gas analysis through pressures from 1 mbar through to full UHV/XHV. Direct plasma ion monitors - the EQP, PSM and IMP series - provide real-time plasma ion diagnostics and etching end-point determination, monitoring both positive and negative ions together with neutral species.
The HPR-60 system with multi-stage pressure reduction extends the plasma diagnostics capability through to pressures as high as 5 bar.
