Rigaku Wins Order for a TXRF 450mm Spectrometer

Rigaku Corporation has been selected by a global Semiconductor Equipment Manufacturer as their supplier of a TXRF-V450 Total-reflection X-Ray Fluorescence Spectrometer, for contamination measurement on 450mm diameter Silicon Wafers.

Mr. Yoichi Yokomizo, Executive VP and GM of Rigaku’s International Sales and Marketing Division said: “We are delighted to announce a Technology Partnership with a global Semiconductor Equipment Manufacturer and to have validation of our decision to invest in fully automated TXRF equipment for 450mm wafers, with optional integrated VPD (Vapor Phase Decomposition). We expect this sale to strengthen our large market share of TXRF tools in the global market and enhance our reputation of providing leading-edge tools for the semiconductor industry.

These new 450mm tools are expected to be adopted by each of the world’s leading semiconductor manufacturers, already familiar with high-speed, full wafer mapping (SP-TXRF), zero edge exclusion (ZEE-TXRF), automated backside measurements (BAC-TXRF) and, of course, our widely-used integrated Vapor Phase Decomposition (VPD-TXRF) designed for high-volume, in-line surface contamination measurement applications. All these tools are available with factory automation (GEM) software.”