Monitoring of volatile organic contamination in cleanroom environments
VOCs can cause serious problems in production processes related to hazing of optics, masks, wafers as well as the formation of films and particles. Tooldown time can significantly be increased because of a too high VOC contamination. Proton Transfer Reaction - Mass Spectrometry, the ultra-sensitive online measuring solutions detailed in this application note provide powerful tools to detect organic contamination and monitor continuously cleanroom environments.
