JEOL Introduces New Field Emission Electron Probe
Product News Sep 16, 2004
JEOL has introduced an advanced electron probe microanalyzer (EPMA) with a thermal field emission electron gun designed specifically for high resolution, low-accelerating-voltage microanalysis and ultrahigh resolution imaging of solid materials.
A fully automated, high-throughput, microprobe, the JXA-8500F can simultaneously utilize up to five wavelength dispersive x-ray spectrometers (WDS) and an energy dispersive x-ray spectrometer (EDS) for combined quantitative and qualitative element analysis of submicron sample areas.
The JXA-8500F features a Schottky-type field emission gun, which produces a pinpoint probe diameter one-half to one-tenth the size of conventional probes, as small as 40nm. The JXA- 8500F operates at low accelerating voltages of 1 to 30 kV over a wide range of probe currents, from 10pA to 500nA, with excellent probe stability.
The ability to achieve high probe currents and small probe diameters, especially at low accelerating voltages, makes the EPMA well suited for high-precision elemental analysis of extremely small analytical volumes. The X-ray analyzer uses high sensitivity analyzing crystals to rapidly produce element maps showing the distribution and concentration of multiple elements within a sample.