The Hiden EQP Plasma Diagnostic with On-board MCA
The Hiden EQP plasma diagnostic system is a pure research tool specifically derived and enhanced for the plasma researcher, providing mass and energy analysis of both positive and negative process ions together with measurement of neutral species.
The MASsoft operating program now features the new integral and innovative 6000-bin multichannel scalar function with timing resolution of just 50 nanoseconds and is suited to a diverse range of pulsed plasma studies, operating in conjunction with the MASsoft integral on-board timers with realtime gating control of both ‘gate open/close’ and ‘gate increment’ periodicity.
The differentially pumped system is developed around the Hiden high-performance triple-filter quadrupole mass spectrometer and includes a 45 degree sector energy analyzer, electron bombardment ionizer and pulse ion counting detector.
The system multiple scan concept enables scanning of all individual control parameters to determine the relationship of ion mass, ion energy and time, enabling the auto-tune setup function to automatically optimize control parameters to match the specific operating environment.
Systems are offered with a choice of single, double or triple stage differential pumping to address plasma process pressure environments from millibar up to 5 bar.