Enthalpy and Volume Changes for m-t Phase Transition in HfO²

Poster Jan 09, 2007

Enthalpy and Volume Changes for m-t Phase Transition in HfO<SUP>2</SUP>

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Sergey V. Ushakov and Alexandra Navrotsky

Objective
HfO² is a prospective material for application as high-temperature ceramic and (transformation toughening above 1100^OC) high-K dielectric in integrated circuits (reducing leakage current compared with SiO. HfO² isostructural to zirconium oxide and undergo monoclinic-tetragonal and tetragonal-cubic translations with temperate.

High Temperature phases are not quenchable but can be obtained in high area samples. Monoclinic-tetragonal transition in hafnia is critical for its application. However, there are no thermochemical data on phase transitions in HfO² The objective of this works was to determine enthalpy and volume changes for m-t transition in HfO² by direct measurements.

This work is licensed under a Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International License

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