Multifunctional, “Smart”, Polymeric Microfluidics Fabricated by Plasma Processing: Applications in Capillary Filling, and Passive Superhydrophobic Valving

We demonstrate a mass-production amenable technology for fabrication, surface modification and multifunction integration in plastic, disposable microfluidic devices, namely direct lithography on the plastic substrate followed by polymer plasma etching, and if desired by selective plasma deposition. We apply the plasma processing technology to fabricate polymeric microfluidics in Poly(methyl methacrylate) (PMMA) and Poly(ether ether ketone) (PEEK). Our approach proposes “smart” multifunctional microfluidics fabricated by plasma technology toolbox.