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New Nanofabrication Capabilities Now Available on Carl Zeiss Helium Ion Microscope
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Carl Zeiss introduced a new Gas Injection System for the ORION® Plus Helium Ion Microscope. The combination of a sub-nanometer (less than 0.35nm) probe of inert gas ions with a small interaction volume at the sample surface enables precise induction chemistries. The resulting structures have extremely small dimensions and high profile fidelity. This technology is being unveiled at the M&M 2010 Conference in Portland, Oregon, August 1-5.
