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Sensirion's Microfluidic Flow Sensors Feature Integration
Sensirion AG of Zurich, Switzerland, has announced its third-generation MEMS-based liquid flow sensors for microfluidic systems, designed for analytical instruments, medical devices, and life-science applications. On-chip integration promises reductions in cost, size, and weight.
The key "third generation" feature involves merging the sensor element with digital intelligence for linearization and temperature compensation on a single chip. Miniaturization techniques have enabled weight reduction to 6 grams.
According to Sensirion, the devices promise media detection and accurate measurement of very low liquid flow rates (nanoliters per minute), with millisecond response times to facilitate monitoring and controlling dynamic effects, and reliable repeatability. A patented design involving PEEK or fused silica (glass) channels enable complete isolation of liquid media.
The largest model is designed for flow rates up to 3 ml/min. in microfluidic systems.
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